快(kuai)速退(tui)火爐是(shi)現代大規模集(ji)成(cheng)電路生產工(gong)藝過程中(zhong)的(de)關(guan)鍵(jian)裝備

     主要用于離(li)子注入后雜質的(de)(de)激活、淺結制作、生(sheng)長高(gao)質量(liang)的(de)(de)氧化膜層和(he)(he)金(jin)屬(shu)硅化物合金(jin)形成等工(gong)藝。隨著集(ji)成電路工(gong)藝技(ji)術的(de)(de)飛速發展(zhan),開(kai)展(zhan)快(kuai)速退(tui)火爐系統的(de)(de)技(ji)術研究,對國內開(kai)發和(he)(he)研究具有(you)自主知識產(chan)權的(de)(de)快(kuai)速退(tui)火爐裝備,有(you)著十(shi)分重(zhong)要的(de)(de)理論意義和(he)(he)工(gong)程應用價值。

      本(ben)文針對現代半導體(ti)器件退(tui)(tui)火(huo)工藝對快速退(tui)(tui)火(huo)爐(lu)系統(tong)(tong)的技術要(yao)求,在綜(zong)合分析國內(nei)外各種快速退(tui)(tui)火(huo)爐(lu)系統(tong)(tong)技術基礎(chu)上,通過深入的分析研究,設計(ji)了系統(tong)(tong)總(zong)體(ti)技術方(fang)案(an)。擬定采用燈光輻射型熱源裝(zhuang)置,上下兩(liang)排成正(zheng)交的燈管組對位于(yu)其中間(jian)的半導體(ti)硅(gui)片(pian)進(jin)行直接(jie)加熱實現溫度(du)的快速上升,以單點測溫作(zuo)為(wei)溫度(du)測量的解決方(fang)案(an)作(zuo)為(wei)系統(tong)(tong)總(zong)體(ti)方(fang)案(an)。

      根據熱(re)傳導基本(ben)理論,以實(shi)現(xian)系統(tong)(tong)(tong)(tong)總(zong)體技(ji)術指標作為已知參數計算得到系統(tong)(tong)(tong)(tong)所需要的熱(re)功(gong)率,在此(ci)基礎上實(shi)現(xian)熱(re)源與反(fan)應腔體、冷卻系統(tong)(tong)(tong)(tong)、送氣(qi)系統(tong)(tong)(tong)(tong)等部件的設(she)計。

     通過分析影響(xiang)硅片(pian)表面溫(wen)度(du)(du)(du)(du)邊緣效(xiao)應的(de)(de)(de)因素,提出燈(deng)管分區及分區控(kong)(kong)制(zhi)(zhi)的(de)(de)(de)設計方(fang)案,實(shi)現(xian)硅片(pian)表面溫(wen)度(du)(du)(du)(du)的(de)(de)(de)均勻性(xing)；通過非接觸式溫(wen)度(du)(du)(du)(du)測量原(yuan)理的(de)(de)(de)分析,完成(cheng)光學高溫(wen)計選(xuan)型(xing)、測溫(wen)方(fang)案以及溫(wen)度(du)(du)(du)(du)校準設計,實(shi)現(xian)溫(wen)度(du)(du)(du)(du)的(de)(de)(de)精確測量,基于系統(tong)(tong)模型(xing)的(de)(de)(de)溫(wen)度(du)(du)(du)(du)控(kong)(kong)制(zhi)(zhi)器設計保證了(le)溫(wen)度(du)(du)(du)(du)控(kong)(kong)制(zhi)(zhi)的(de)(de)(de)精度(du)(du)(du)(du)與穩定度(du)(du)(du)(du)；在分析硅片(pian)傳(chuan)(chuan)送功(gong)(gong)能(neng)性(xing)要(yao)求的(de)(de)(de)基礎(chu)上,完成(cheng)傳(chuan)(chuan)送系統(tong)(tong)流程設計,實(shi)現(xian)了(le)系統(tong)(tong)傳(chuan)(chuan)片(pian)效(xiao)率與傳(chuan)(chuan)片(pian)的(de)(de)(de)高可靠性(xing)；控(kong)(kong)制(zhi)(zhi)系統(tong)(tong)功(gong)(gong)能(neng)性(xing)設計、總體架構以及主控(kong)(kong)制(zhi)(zhi)程序(xu)流程圖設計實(shi)現(xian)整機的(de)(de)(de)全自(zi)動(dong)(dong)(dong)化,保證系統(tong)(tong)具有自(zi)動(dong)(dong)(dong)化水平高、控(kong)(kong)制(zhi)(zhi)和管理功(gong)(gong)能(neng)強大(da)、操作簡便、可靠性(xing)高等(deng)特點,能(neng)很好地(di)適應快(kuai)速退(tui)(tui)火爐系統(tong)(tong)對自(zi)動(dong)(dong)(dong)控(kong)(kong)制(zhi)(zhi)的(de)(de)(de)要(yao)求。試驗(yan)結(jie)果表明(ming),本文所設計的(de)(de)(de)快(kuai)速退(tui)(tui)火爐系統(tong)(tong)可以滿(man)足半導體快(kuai)速退(tui)(tui)火工藝對設備(bei)的(de)(de)(de)要(yao)求。